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Trudy FTIAN. T. 27. Kvantovye kompjutery, mikro- i nanoėlektronika: fizika, technologija, diagnostika i modelirovanie (978-5-02-040089-4)


Category: serial -> Science. Mathematics. Physics. Chemistry. Biology.
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Title:
Trudy FTIAN. T. 27. Kvantovye kompjutery, mikro- i nanoėlektronika: fizika, technologija, diagnostika i modelirovanie 
Author:
 
Publisher:
Nauka
Place of publication:
Sankt-Peterburg  (Russian Federation)
Year of publication:
2018 
Number of pages:
138, Softcover 
Serial:
 
ISBN:
978-5-02-040089-4
EAN:
9785020400894
Price:
EUR 29,00
Delivery time:
Deliverable within 4-6 weeks
Notes:
-
Monografičeskij sbornik predstavljaet teoretičeskie i ėksperimentalnye rezultaty, polučennye sotrudnikami Instituta v oblasti fiziki, modelirovanija i technologij peredovych nanotranzistornych struktur dlja logičeskich intefalnych schem (UBIS), nanostruktur dlja tverdotelnych generatorov teragercovogo diapazona častot. Predstavleny issledovanija ključevych technologičeskich processov izgotovlenija takich priborov s kritičeskimi razmerami 11–32 nm: ėlektronno-lučevoj litografii, plazmennogo nano-strukturirovanija, atomno-sloevogo osaždenija diėlektrikov i metallov. Privodjatsja rezultaty v oblasti mikrostrukturirovanija poristych low-k diėlektrikov dlja sistem mnogourovnevoj metallizacii. Bolšinstvo issledovanij provedeno v ramkach Programmy FNI FANO Rossii.