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Mikroėlektronika (0544-1269)


Category: serial -> Magazines subscription for 2018
No image available.
Title:
Mikroėlektronika 
Author:
akad. Orlikovskij Aleksandr Aleksandrovič 
Publisher:
RAN
Place of publication:
  (Russian Federation)
Year of publication:
2018 
Number of pages:
6 
Serial:
Informatika 
ISBN:
0544-1269
EAN:
05441269
Price:
EUR 358,00
Delivery time:
Deliverable within 4-6 weeks
Notes:
-
Osnovan v 1972 g. Žurnal «Mikroėlektronika» publikuet stati, posvjaščennye technologičeskim, fizičeskim i schemotechničeskim aspektam mikro- i nanoėlektroniki. Osoboe vnimanie izdanie udeljaet novym tendencijam v litografii, travleniju, legirovaniju, osaždeniju i planarizacii na submikronnom i nanometrovom urovnjach, plazmennym technologijam, molekuljarno-pučkovoj ėpitaksii i suchomu travleniju, a takže metodam issledovanija i kontrolja poverchnostej i mnogoslojnych struktur. Obsuždajutsja voprosy priborno-technologičeskogo modelirovanija i diagnostiki technologičeskich processov v realnom vremeni. Publikujutsja stati o poluprovodnikovych priborach na baze novych fizičeskich javlenij, takich kak kvantovye razmernye ėffekty i sverchprovodimost.